Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2006-09-19
2010-10-05
Hoang, Quoc D (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C257S421000
Reexamination Certificate
active
07807492
ABSTRACT:
A MRAM memory and process thereof is described. A GMR magnetic layer is patterned to form a memory bit layer and an intermediate conductive layer. The intermediate conductive layer is disposed between two conductive layers such that shallow metal plugs can be utilized to interconnect the intermediate conductive layer and the conductive layers. Thus, a conventional deep tungsten plug process, interconnecting two conductive layers, is eliminated.
REFERENCES:
patent: 2005/0270831 (2005-12-01), Witcraft et al.
patent: 2006/0102970 (2006-05-01), Butcher et al.
Lai James Chyi
Wilson Vicki
Zhan Guoqing
Hoang Quoc D
Northern Lights Semiconductor Corp.
Thomas Kayden Horstemeyer & Risley LLP
Tran Tony
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