Magnetoresistive pressure-sensing device for automotive electron

Details Magnetoresistive pressure-sensing device for automotive electron Magnetoresistive pressure-sensing device for automotive electron

1979-02-15

1980-08-19

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73726, 338 4, 338 32R, G01L 904

Patent

active

042177839

ABSTRACT:
A pressure sensor comprises essentially magnetoresistive elements formed on a diaphragm serving as a stress magnifier. The diaphragm may be made, for example, of glass in a thickness of 0.5 millimeter, and the magnetoresistive elements can be formed thereon in any desired pattern of thin stripes by ordinary thin-film techniques. Such sensor elements can be mass produced, e.g., by vapor deposition and etching on a large sheet of diaphragm material and cutting into chips of desired shape and size.

REFERENCES:
patent: 3418163 (1968-12-01), Oberg et al.
patent: 3807223 (1974-04-01), Juillerat et al.
patent: 3838595 (1974-10-01), Godefroy

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