Magnetooptic layer and a process for its fabrication

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428336, 428610, 428684ML, 428684SC, 4286846R, 428684NF, 428684MM, 428684T, 428684RF, 428684XS, 428900, 428638, 2041921, 2041922, 20419226, 363 13, G11B 566, B32B 516, C23C 1400

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055276059

ABSTRACT:
A magnetooptic layer made from rare-earth metals and transition metals exhibits a gradient in the alloy composition over the layer depth, and has a coercive field strength of more than 8 kOe in the temperature range of .DELTA.T=100.degree. C. around the compensation temperature T.sub.comp. The layer is fabricated with a dynamic sputter process, in which the substrates to be coated are led past one or a plurality of sputter targets, arranged in a common plane parallel to the track of the substrates. A mask is located between the sputter targets and the substrates.

REFERENCES:
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patent: 4670356 (1987-06-01), Sato et al.
patent: 4694358 (1987-09-01), Muchnik et al.
patent: 4740430 (1988-04-01), Frankenthal et al.
S. Takayama, et al., "Magnetic and Magneto-Optical Properties of Tb-Fe-Co Amorphous Films", J. Appl. Phys. 61(7), Apr. 1, 1987, American Institute of Physics, pp. 2610-2616.
S. Asari, et al. "Preparation of a Magneto-Optical Disk Using a Rare Earth-Transition Metal Alloy Target", J. Vac. Sci. Technol. A5(4), Jul./Aug. 1987, pp. 1949-1951.
E. Schultheiss, et al., "Production Technology for Magnetooptic Data Storage Media", Solid State Technology/Mar. 1988, pp. 107-112.
Masahiko Takahash et al., "Study on Recorded Domain Characteristics of Magneto-Optical tbFeCo Disks," Journal of Applied Physics, vol. 64 (1), Jul. 1, 1988, pp. 262-269.
S. Takayama et al., "Magnetic and Magneto-Optical Properties of Tb-Fe-Co Amorphous Films," Journal of Applied Physics, vol. 61 (7), Apr. 1, 1987, pp. 2610-2616.
S. Asari et al., "Preparation of a Magneto-Optical Disk Using a Rare Earth-Transition Metal Alloy Target," J. Vac. Sci. Technol., vol. A 5 (4), Jul./Aug. 1987, pp. 1949-1951.
E. Schultheiss, "Production Technology for Magnetooptic Data Storage Media," Solid State Technology, Mar., 1988, pp. 107-112.
M. H. Kryder et al., "Stability of Perpendicular Domains in Thermomagnetic Recording Materials," pp. 236-241.

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