Pumps – Electrical or getter type – Electromagnetic
Patent
1990-05-16
1992-11-24
Bertsch, Richard A.
Pumps
Electrical or getter type
Electromagnetic
417 53, 417205, 310 11, H02K 4402
Patent
active
051658615
ABSTRACT:
This invention relates to the technology of preparing a vacuum by removing gases from an enclosed volume and to the use of magnetized plasma as the working fluid in a vacuum pump. The pumping action is created by ionizing the gas to be pumped with microwave radiation and then by exerting magnetohydrodynamic forces on the plasma to flow through a region of constricted space which impedes the backflow of neutral gas thus causing compression of the gas in the exit region. The magnetohydrodynamic forces arise as the vector product of a plasma current j and a magnetic field B, which are imposed on the plasma by a structure of electrodes and permanent magnets. The geometry of this structure is such that the magnetic force and the plasma current between electrodes are approximately perpendicular to each other and to the axis of the device. The resulting j.times.B force then creates an axial plasma flow and neutral compression. This invention additionally relates to the molecular dissociation of toxic or corrosive constituents of the gas being pumped, as a consequence of the ionization process, and to the benefit that the toxics or corrosives are destroyed without an additional process required. This invention additionally relates to the production of desirable chemical reactions among intentionally-introduced gases that are enhanced by the high temperature and ionized state of the resulting plasma.
REFERENCES:
patent: 3160100 (1964-12-01), Poppendiek
patent: 3241490 (1966-03-01), Ricateau et al.
patent: 3379904 (1968-04-01), Wallis et al.
patent: 3508087 (1970-04-01), Millet et al.
patent: 4641060 (1987-02-01), Dandl
patent: 4797068 (1989-01-01), Hayakawa et al.
Bertsch Richard A.
Microwave Plasma Products Inc.
Scheuermann David W.
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