Magneto-optical recording medium

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428336, 428694MM, 428694ML, 428694RE, 428694NF, 428694XS, 428694DE, 428694RL, 428702, 428704, 428900, 428698, G11B 566

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active

054767130

ABSTRACT:
A magneto-optical recording medium having at least two kinds of films consisting of a rare earth metal-transition metal alloy thin film and a dielectric film formed on a substrate. The dielectric film is formed by sputtering a target in an atmosphere containing at least an oxygen gas or a compound gas containing oxygen as one constitutional element. Particularly, the use of a carbon dioxide gas CO.sub.2 or a carbon monoxide gas CO provides for an SiCON film rather than an Si.sub.3 N.sub.4 film. The SiCON film has a refractive index and an absorptivity almost identical with those of the Si.sub.3 N.sub.4 film, and has a thermal conductivity smaller than that of the Si.sub.3 N.sub.4 film. As a result, it has been found that the SiCON film is advantageous from the viewpoints of a magnetic field sensitivity and a film thickness.

REFERENCES:
patent: 4661420 (1987-04-01), Nakamura et al.

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