Magnetically positioned X-Y stage having six degrees of freedom

Details Magnetically positioned X-Y stage having six degrees of freedom Magnetically positioned X-Y stage having six degrees of freedom

1999-03-22

2000-06-06

Ramirez, Nestor

Electrical generator or motor structure

Dynamoelectric

Linear

310 17, 414935, H02K 4102

Patent

active

060722517

ABSTRACT:
The respective magnets of each of a plurality of spaced Halbach magnet arrays in both the X and Y directions that incorporate in the arrays in both directions, the magnets having a filed oriented parallel to the Z axis in alternately the positive and negative directions. The magnets in each array in each direction that are not shared by the crossing Halbach magnet arrays each has a horizontal field orientation parallel to either the X or the Y axis with the filed direction in each instance pointing toward the adjacent magnet having its filed oriented in the positive Z direction. Additionally, up to four layers of coils of wire in separate X-Y planes in substantially vertical alignment with each other contain coils each with a selected orientation relative to the X or Y axis such that they provide levitation, lateral motion, as well as roll, pitch and yaw adjustments to the magnet array forming an X-Y stage for precision positioning an object located on the top surface of the magnet.

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