Magnetically levitated robot and method of increasing levitation

Details Magnetically levitated robot and method of increasing levitation Magnetically levitated robot and method of increasing levitation

1996-09-18

1999-11-09

Underwood, Donald W.

Material or article handling

Load carried along a horizontal linear path

Carried via magnetic floating

198619, B25J 1300

Patent

active

059801930

ABSTRACT:
A magnetically levitated transport device provides levitation and propulsion of a vacuum carriage. An air carriage is moved by conventional means through both linear and angular displacements. Non-magnetic coils mounted on the air carriage interact with permanent magnets mounted on the vacuum carriage to magnetically link the carriages together using Lorentz forces. The non-magnetic coils, which are exposed to the fields generated by the permanent magnets, produce the Lorentz forces when driven by drive currents in response to inputs received from position sensors. In one embodiment, power requirements are reduced by adding permanent magnets to the air carriage that interact with some of the permanent magnets on the vacuum carriage to provide forces that substantially levitate all of the static load.

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K.H. Park et al., "Contactless Magnetically Levitated Silicon Wafer Transport System," Mechatronics, vol. 6, No. 5, Aug. 1, 1996.

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