Magnetically coupled wafer lift pins

Details Magnetically coupled wafer lift pins Magnetically coupled wafer lift pins

1987-04-03

1988-12-13

Beck, Shrive

Coating apparatus

Work holders, or handling devices

118729, 198619, 1983462, 414217, B05C 1300

Patent

active

047902582

ABSTRACT:
An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin.

REFERENCES:
patent: 2703719 (1955-03-01), Crothers
patent: 4523985 (1985-06-01), Dimock
patent: 4540326 (1985-09-01), Southworth et al.
patent: 4558984 (1985-12-01), Garrett
patent: 4584045 (1986-04-01), Richards
patent: 4589541 (1986-05-01), Lisec
patent: 4591044 (1986-05-01), Orami et al.
patent: 4632624 (1986-12-01), Mirkovich et al.
patent: 4664578 (1987-05-01), Kakehi

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