Magnetically-assisted sputtering method for producing vertical r

Details Magnetically-assisted sputtering method for producing vertical r Magnetically-assisted sputtering method for producing vertical r

1983-01-31

1983-11-08

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192R, 204298, C23C 1500

Patent

active

044140878

ABSTRACT:
Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.

REFERENCES:
patent: 4094761 (1978-06-01), Wilson
patent: 4159909 (1979-07-01), Wilson
patent: 4260466 (1981-04-01), Shirahata
patent: 4299678 (1981-11-01), Meckel
patent: 4324631 (1982-04-01), Meckel
patent: 4374009 (1983-02-01), TuChen et al.

Affiliated with

Also associated with

Rating

Magnetically-assisted sputtering method for producing vertical r does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetically-assisted sputtering method for producing vertical r, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetically-assisted sputtering method for producing vertical r will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2006467