Magnetically actuated micro-electro-mechanical apparatus and...

Details Magnetically actuated micro-electro-mechanical apparatus and... Magnetically actuated micro-electro-mechanical apparatus and...

2006-01-24

2006-01-24

Epps, Georgia (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100

Reexamination Certificate

active

06989921

ABSTRACT:
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.

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