Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1994-06-10
1996-01-02
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
25049221, 335210, 335213, H01J 37147
Patent
active
054811163
ABSTRACT:
A magnetic system for uniformly scanning an ion beam comprising a magnetic structure having poles with associated scanning coils and respective pole faces that define therebetween a gap through which the ion beam passes; and a magnetic circuit for producing in the gap a magnetic field of sufficient magnitude to prevent the occurrence of a recently observed plasma effect in which the transverse cross-section of the ion beam substantially fluctuates in size while the ion beam is being scanned across the selected surface.
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H. F. Glavish et al., "Fast Magnetic Scanning and Ion Optical Features of the New Ibis Oxygen Implanter," Nucl. Instr. & Methods, vol. B74, pp. 397-400 (1993).
Glavish Hilton F.
Guerra, deceased Michael A.
Berman Jack I.
Ibis Technology Corporation
Nguyen Kiet T.
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