Magnetic support structure for an elevator tube of a...

Details Magnetic support structure for an elevator tube of a... Magnetic support structure for an elevator tube of a...

2006-09-05

2006-09-05

Bidwell, James R. (Department: 3651)

Conveyors: power-driven

Conveyor section

Load propelled as the reactive means in a linear motor or...

C414S003000

Reexamination Certificate

active

07100759

ABSTRACT:
A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator structure includes a workpiece support for supporting the workpiece and an elevator shaft coupled to the workpiece support and extending externally from the processing chamber. An end portion of the elevator shaft, external to the processing chamber, has a selected magnetic polarity. The elevator structure also includes moveable carriage coupled to the shaft to provide vertical movement of the workpiece within the processing chamber. The carriage includes a shaft support having the selected polarity. The shaft support is positioned adjacent the polarized end portion of the elevator shaft such that repulsive magnetic forces maintain a gap between the end portion of the elevator shaft and the shaft support as the shaft support and elevator shaft move vertically along a path of travel.

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