Magnetic sputtering anode reconditioning

Details Magnetic sputtering anode reconditioning Magnetic sputtering anode reconditioning

1984-01-17

1984-10-23

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

044787006

ABSTRACT:
A method for reconditioning an anode which has lost effectiveness as a result of the deposition of a dielectric material in a cathode sputtering process is disclosed, whereby the effectiveness of the anode is restored by depositing a conductive material over the dielectric material which has been deposited on the anode.

REFERENCES:
patent: 3325393 (1967-06-01), Darrow et al.
patent: 4166018 (1979-08-01), Chapin
patent: 4200510 (1980-04-01), O'Connell et al.
patent: 4379040 (1982-12-01), Gillery
Stern, IBM Tech. Disc. Bull., 12, (1969), p. 149.
Buchman et al., IBM Tech. Disc. Bull., 15, (1972), pp. 1818-1819.
Petuai et al., IBM Tech. Disc. Bull., 25, (1983), p. 6595.

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