Electricity: measuring and testing – Magnetic – Magnetometers
Patent
1987-03-04
1989-10-17
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Magnetic
Magnetometers
338 32R, 307309, 357 27, H01L 2722, H01L 4306, G01R 3306, H03K 1790
Patent
active
048750115
ABSTRACT:
Two Hall effect devices are formed on a major surface of a silicon single crystal substrate lying in parallel to the (100) crystalline plane and series-connected to form a magnetic sensor. Each of the Hall effect devices has a pair of drive electrodes spaced apart from each other in a direction substantially parallel to the <100> or <010> crystalline axis and held at different potentials for flowing therebetween a drive current in said direction to drive the Hall effect device and a pair of Hall terminals for developing a Hall voltage when exposed to an external magnetic field. A comparator compares the potentials of two selected Hall terminals of the different Hall devices with each other to produce a compared signal. A switching element is connected to one of the Hall devices to control the potential of the Hall terminals to equalize the potentials of the two selected Hall terminals in response to the compared signal. Two non-selected Hall terminals develop positive and negative Hall voltages, respectively, relative to the selected Hall terminals so that the magnetic sensor produces a totalized Hall voltage of the two Hall effect devices.
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Gouda Masanori
Kamiya Masaaki
Namiki Masayuki
Adams Bruce L.
Eisenzopf Reinhard J.
Seiko Instruments Inc.
Snow Walter E.
Wilks Van C.
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