Magnetic sensor system including stacked hall effect devices det

Details Magnetic sensor system including stacked hall effect devices det Magnetic sensor system including stacked hall effect devices det

1991-06-26

1992-09-08

Lateef, Marvin M.

Electrical resistors

Resistance value responsive to a condition

Magnetic field or compass

H01L 4300

Patent

active

051462010

ABSTRACT:
A magnetic sensor system includes stacked substrates each including a respective Hall element for detecting mutually orthogonal magnetic fields. Each Hall device includes a semiconductor material formed as a rectangular solid in a central portion of an opposite conductivity type substrate. The semiconductor material is sandwiched in a first direction between a pair of current electrodes and sandwiched in a second direction orthogonal to the first direction between a pair of Hall voltage detecting electrodes. Multiple substrates are stacked to detect magnetic fields in three dimensions. An analog-to-digital converter is formed in an additional stacked substrate.

REFERENCES:
patent: 4584552 (1986-04-01), Suzuki et al.
patent: 4733177 (1988-03-01), Pawletko
patent: 4829352 (1989-05-01), Popovic et al.
Kogyo Chosakai Publishing Co., Ltd., "The Technique for Utilizing A Sensor", edited by Kogyochosakai-Henshubu, Japan, 1984, pp. 260-261.

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