Magnetic sensor of very high sensitivity

Details Magnetic sensor of very high sensitivity Magnetic sensor of very high sensitivity

2008-07-08

2008-07-08

Pizarro, Marcos D. (Department: 2814)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having air-gap dielectric

C428S057000, C428S700000, C257SE29323

Reexamination Certificate

active

07396736

ABSTRACT:
A magnetic sensor includes a thin deformable membrane made of a conductive material forming a first plate of a capacitor which conducts an electric current therethrough. A second capacitor plate of the capacitor includes a doped region of a semiconductor substrate. A layer of a gaseous dielectric separates the two plates. The membrane deforms due to the effect of the Lorentz force generated by a magnetic field lying in the plane of the membrane and perpendicular to the lines of current being conducted therethrough. In addition, a process for fabricating this magnetic sensor is also provided as well as a device for measuring a magnetic field using the magnetic sensor.

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