Magnetic sensor apparatus and manufacturing method thereof

Details Magnetic sensor apparatus and manufacturing method thereof Magnetic sensor apparatus and manufacturing method thereof

2007-05-22

2007-05-22

Lefkowitz, Edward (Department: 2862)

Electricity: measuring and testing

Magnetic

Magnetometers

C324S207200

Reexamination Certificate

active

11050672

ABSTRACT:
Two Hall element forming arrangements are formed on a semiconductor substrate. Each Hall element forming arrangement includes a Hall element that is formed in a principal surface of the semiconductor substrate. A base is formed separately from the semiconductor substrate. Then, the base is disposed at a rear surface of the semiconductor substrate and holds the semiconductor substrate and the Hall element forming arrangements. The base includes a holding surface, which holds the semiconductor substrate, and two slant surfaces, each of which is slanted relative to the holding surface. Each Hall element forming arrangement is held on a corresponding one of the at least one slant surface of the base.

REFERENCES:
patent: 5446307 (1995-08-01), Lux et al.
patent: 6169254 (2001-01-01), Pant et al.
patent: 2004/0103530 (2004-06-01), Adachi et al.
patent: 4302406 (1992-10-01), None
patent: 05-291482 (1993-05-01), None
patent: 9257511 (1997-10-01), None
patent: 2002-156204 (2000-11-01), None
S. Kawahito et al., Micromachined Hall Elements for Two-Dimensional Magnetic-Field Sensing, 1994, Sensor and Actuators A40 Feb. 1994, No. 2, all pages.
S. Kawahito et al., “MOS Hall Elements with Three-Dimensional Micorstructure”, Transducers 93′, The 7thInternational Conference on Solid-State Sensors and Actuators, pp. 892-895, 1993.
Y. Watanabe et al., “3-Axis Sensor Fagbricated by Microassembly Technique”, IEEE Japan, Transactions on Sensors and Micromachines, vol. 122-E, No. 4, pp. 212-215, 2002.

Affiliated with

Also associated with

Rating

Magnetic sensor apparatus and manufacturing method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetic sensor apparatus and manufacturing method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic sensor apparatus and manufacturing method thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3788826