Magnetic recording medium method and apparatus for fabricating s

Details Magnetic recording medium method and apparatus for fabricating s Magnetic recording medium method and apparatus for fabricating s

1993-11-10

1997-02-18

Kiliman, Leszek

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

428336, 428611, 428668, 428670, 428678, 428694T, 428694TM, 428694ML, 428694SC, 428694MT, 428694MM, 428900, 427127, 427128, 427129, 427130, 427132, 20419715, 2041922, 2041921, G11B 566, B32B 516, B05D 512, C23C 1400

Patent

active

056040300

ABSTRACT:
A magnetic recording medium having a substrate, and an artificial superlattice deposited on the substrate as a vertical magnetization film. The artificial superlattice is a Co/Pt artificial superlattice which is composed of alternate Co and Pt layers deposited on the substrate. The magnetic recording medium is fabricated by the steps of: disposing a Co target and a Pt or Pd target separating from a substrate; performing an RF sputtering to the substrate by alternately facing the substrate with the Co target and the Pt or Pd target by means of periodical movement of the substrate, thereby forming a Co/Pt or Co/Pd artificial superlattice) on the substrate; and performing heat treatment to the Co/Pt or Co/Pd artificial superlattice at a temperature T in the range of 200.degree. C. to 450.degree. C. inclusive.

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Patent Abstracts of Japan, unexamined application, field P, vol. 14, No. 183, Apr. 12, 1990, Kokai-No. 02-29 956.
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Patent Abstracts of Japan, unexamined applications, P field, vol. 15, No. 251, Jun. 26, 1991.
Patent Abstracts of Japan, unexamined applications, P field, vol. 15, No. 251, Jun. 26, 1991, Kokai-No. 03-80 445.

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