Magnetic recording medium and production process thereof

Details Magnetic recording medium and production process thereof Magnetic recording medium and production process thereof

2000-06-14

2004-01-20

Resan, Stevan A. (Department: 1773)

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

C428S408000, C428S690000, C427S131000, C427S535000, C427S577000

Reexamination Certificate

active

06680112

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates to a magnetic recording medium used in, for example, a magnetic disk apparatus, and to a production process for the medium.
BACKGROUND OF THE INVENTION
A conventionally employed magnetic recording medium comprises a non-magnetic substrate having a non-magnetic undercoat film and a magnetic film thereon; a protective film such as carbon film provided thereon; and on the protective film a lubricating film comprising a lubricant such as perfluoropolyether.
In recent years, a magnetic recording medium which can reduce spacing loss has been demanded for enhancing recording density of the medium.
A carbonaceous protective film is typically formed through sputtering. However, when a thin protective film; i.e., a protective film as thin as 100 Å or less, is produced through sputtering so as to reduce spacing loss, the film might have poor durability.
Therefore, there has been proposed a plasma CVD process which can be used to form a carbonaceous protective film having sufficient durability even when the formed film is thin.
However, in a magnetic recording medium produced through the above-described conventional technique lubricant adheres easily to a magnetic head, and fly-stiction characteristics might be deteriorated.
When fly-stiction characteristics are deteriorated, the flying stability of a magnetic head decreases, and problems such as head crush easily occur, due to contact between the protective film and the magnetic head.
SUMMARY OF THE INVENTION
Accordingly, the present invention provides a production process for a magnetic recording medium, which process comprises etching the surface of a carbonaceous protective film using plasma generated from an etching gas prior to formation of a lubricating film.
During etching of the surface of the carbonaceous protective film, high-frequency electric power may be applied to a disk on which the carbonaceous protective film is formed, to thereby generate plasma.
In the present invention, there is provided a magnetic recording medium produced through the above-described production process, where the surface of the carbonaceous protective film of the medium contains oxygen in an amount of about 2.9-12% as measured through X-ray photoelectron spectrometry.
Preferably, the carbonaceous protective film has a B/A value as defined hereinafter of about 1.22-1.65 as measured through Raman spectrometric analysis.
Alternatively, a magnetic recording medium produced through the above-described production process is provided, where the surface of the carbonaceous protective film of the medium contains nitrogen in an amount of about 5.0-16.5% as measured through X-ray photoelectron spectrometry.
Preferably, the carbonaceous protective film has a B/A value of about 1.21-1.52 as measured through Raman spectrometric analysis.


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