Magnetic recording medium and method of manufacturing the same

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20419215, 2041922, 427131, 427132, 428694, 428695, 428900, G11B 572, G11B 564

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active

048205842

ABSTRACT:
A magnetic recording medium according to the present invention comprises a non-magnetic substrate, a magnetic recording layer formed on the non-magnetic substrate, and a lubricant layer containing carbon as a major component and formed on the magnetic recording layer. At least one element selected from a group consisting of hydrogen and a halogen is bonded to the carbon, as the major component of the lubricant layer, in a surface region of the lubricant layer. In the formation of the lubricant layer, initially only an inert gas is introduced as an atmospheric gas around a carbon target at the beginning of sputtering, so that the carbon target is sputtered by cations of the inert gas. Thereafter, a gas containing at least one of hydrogen and a halogen is added to sputter the carbon target. Thus, a carbon-hydrogen atomic bond (C-H bond) and/or a carbon-halogen atomic bond (C-X bond; X is a halogen element) are formed on the surface region of the lubricant layer.

REFERENCES:
patent: 4411963 (1983-10-01), Aine
patent: 4419404 (1983-12-01), Arai
patent: 4552820 (1985-11-01), Lin et al.
patent: 4636435 (1987-01-01), Yanagihara
patent: 4647494 (1987-03-01), Meyerson
patent: 4664976 (1987-05-01), Kimura
patent: 4680218 (1987-07-01), Kimura
The Impact of Process Parameters and Coating Source on the Properties of Magnetic Recording Layers, K. Roll, Leybold-Heraeus GmbH, P.O. Box 1555, 6450 Hanau, West Germany, from pp. 14 to 18.
Vacuum-Deposited Thin-Metal-Film Disk, E. M. Rossi, G. McDonough, A. Tietze, T. Arnoldussen, A. Brunsch, S. Doss, M. Henneberg, F. Lin, R. Lyn, A. Ting, and G. Trippel, IBM Corporation, Magnetic Recording Institute, San Jose, CA 95193, Mar. 15, 1984, pp. from 2254 to 2256.

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