Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2005-02-15
2005-02-15
Tsai, H. Jey (Department: 2812)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S268000
Reexamination Certificate
active
06855564
ABSTRACT:
A magnetic random access memory (MRAM) having a vertical structure transistor has the characteristics of faster access time than SRAM, high density as with DRAM, and non-volatility like a flash memory device. The MRAM has a vertical structure transistor, a first word line including the transistor, a contact line connected to the transistor, a magnetic tunnel junction (MTJ) cell deposited on the contact line, a bit line deposited on the MTJ cell, and a second word line deposited on the bit line at the position of MTJ cell. With the disclosed structure, it is possible to improve the integration density of a semiconductor device, to increase the short channel effect, and to improve the control rate of the resistance, while using a simplified manufacturing process.
REFERENCES:
patent: 6379978 (2002-04-01), Goebel et al.
patent: 6473328 (2002-10-01), Mercaldi
patent: 6473336 (2002-10-01), Nakajima et al.
Hynix / Semiconductor Inc.
Marshall & Gerstein & Borun LLP
Tsai H. Jey
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