Magnetic position detection for micro machined optical element

Details Magnetic position detection for micro machined optical element Magnetic position detection for micro machined optical element

2005-06-14

2005-06-14

Patidar, Jay (Department: 2862)

Electricity: measuring and testing

Magnetic

Displacement

C324S207200, C324S207210, C324S207150, C324S207220, C385S016000, C385S018000, C359S223100, C359S225100, C335S078000

Reexamination Certificate

active

06906511

ABSTRACT:
A property of a magnetic sensor, deployed on a micro machined optical element and exposed to a magnetic field, changes as the position of the micro machined optical element changes with respect to a magnetic field or, alternatively, when the magnetic field changes with respect to the micro machined optical element. The electrical, optical and/or mechanical change in sensor property varies according to the position, and a measurement of the property change tracks the change in orientation of a moveable portion of the optical element.

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