Magnetic position detection apparatus for micro machined...

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

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C385S018000, C359S223100, C359S225100, C335S078000

Reexamination Certificate

active

06891988

ABSTRACT:
An apparatus having magnetic detection sensor deployed on a micro machined optical element is exposed to a magnetic field to sense change in property as the micro machined optical element is manipulated with respect to the magnetic field, and, conversely when the magnetic field is manipulated with respect to the micro machined optical element. The electrical, optical and/or mechanical change in sensor property varies according to said manipulation, and telemetry created by said property change tracks the manipulation of the moveable portion of the optical element. The system includes a configuration capable of compensating for temperature variation.

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