Magnetic objective lens for use in a scanning electron microscop

Details Magnetic objective lens for use in a scanning electron microscop Magnetic objective lens for use in a scanning electron microscop

1982-01-11

1983-12-06

Church, Craig E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 3714

Patent

active

044195818

ABSTRACT:
In a scanning electron microscope, an objective lens has upper, lower and outer magnetic pole pieces. The bore diameter of the lower magnetic pole piece is smaller than those of said upper and outer magnetic pole pieces. The lens field between said upper and lower magnetic pole pieces is generated for observing a bulk specimen positioned at a long working distance. The lens field between said lower and outer magnetic pole pieces is generated for obtaining a high resolution image of a specimen.

REFERENCES:
patent: 4214162 (1980-07-01), Hoppe et al.
patent: 4219732 (1980-08-01), Nakagawa et al.
patent: 4384208 (1983-05-01), Tsuno

Affiliated with

Also associated with

Rating

Magnetic objective lens for use in a scanning electron microscop does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetic objective lens for use in a scanning electron microscop, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic objective lens for use in a scanning electron microscop will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2031342