Magnetic neutral line discharged plasma type surface cleaning ap

Details Magnetic neutral line discharged plasma type surface cleaning ap Magnetic neutral line discharged plasma type surface cleaning ap

1997-05-06

1998-06-09

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723E, 118723I, 20429837, 438905, 134 11, H05H 100

Patent

active

057627509

ABSTRACT:
A surface cleaning apparatus using magnetic neutral line discharged plasma for the purpose of inner-wall surface cleaning of a vacuum vessel assembled in a semiconductor manufacturing machine, which comprises electromagnetic coils for producing a closed magnetic neutral line that is formed by circularly connecting points of zero-intensity magnetic field, rf electric field generator for continuously generating plasma by applying a rf electric field along the magnetic neutral line and a controller for controlling the size and position of the closed magnetic neutral line and the kind, temperature and density of the plasma being generated.

REFERENCES:
patent: 5514246 (1996-05-01), Blalock

Affiliated with

Also associated with

Rating

Magnetic neutral line discharged plasma type surface cleaning ap does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnetic neutral line discharged plasma type surface cleaning ap, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic neutral line discharged plasma type surface cleaning ap will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2194846