Magnetic multilayer film, method for making, and magnetoresistan

Details Magnetic multilayer film, method for making, and magnetoresistan Magnetic multilayer film, method for making, and magnetoresistan

1995-08-29

1997-08-26

Walberg, Teresa J.

Electrical resistors

Resistance value responsive to a condition

Magnetic field or compass

360113, 324252, 32420721, H01L 4300

Patent

active

056614497

ABSTRACT:
A magnetic multilayer film having magnetoresistance (MR) is prepared by alternately depositing first and second magnetic layers while interposing a non-magnetic metal layer therebetween. The number of the first magnetic layers N1 and the number of the second magnetic layers N2 having greater coercivity than the first magnetic layers are in the range: 2.ltoreq.N1.ltoreq.4 and N2=N1-1. The first magnetic layer has a thickness t1 of 10-80 .ANG., second magnetic layer has a thickness t2 of 20-90 .ANG., and non-magnetic metal layer has a thickness t3 of 20-90 .ANG.. The magnetic multilayer film comprising a less number of layers has a great MR ratio, a linear rise of an MR curve in proximity to zero magnetic field, and high sensitivity to a magnetic field. It also has a greater MR slope upon application of a high frequency magnetic field in proximity to zero magnetic field and withstands high temperatures. The magnetic multilayer film is used as a magneto-sensitive section to provide high performance MR devices.

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