Magnetic multilayer film and magnetoresistance element

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324252, 360110, 360113, 428216, 428692, 428693, 428694R, 428694T, 428694TM, 428900, G01R 3302, G11B 5127, G11B 566, B22B 702

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055144527

ABSTRACT:
A magnetic multilayer film having magnetoresistance (MR) is prepared by depositing at least two magnetic thin films having different coercive forces while interposing a non-magnetic thin film therebetween. A first magnetic thin film having a lower coercive force has a squareness ratio SQ.sub.1 of 0.01-0.5, an anisotropic magnetic field Hk of 1-20 Oe, and a thickness t.sub.1, a second magnetic thin film having a higher coercive force has a squareness ratio SQ.sub.2 of 0.7-1.0 and a thickness t.sub.2 .ltoreq.t.sub.1, and the non-magnetic thin film has a thickness t.sub.3 .ltoreq.200 .ANG.. A first preferred form requires 4 .ANG..ltoreq.t.sub.2 <30 .ANG. and 6 .ANG..ltoreq.t.sub.1 .ltoreq.200 .ANG.. A second preferred form requires 4 .ANG..ltoreq.t.sub.2 <20 .ANG. and 10 .ANG..ltoreq.t.sub.1 <20 .ANG.. A third preferred form requires 4 .ANG..ltoreq.t.sub.2 <30 .ANG. and 6 .ANG..ltoreq.t.sub.1 .ltoreq.40 .ANG.. The magnetic multilayer film has a great MR ratio of more than several percents in a low external magnetic field, a sharp rise at zero magnetic field and high heat resistance. It also has improved hysteresis and MR slope in an applied magnetic field between -10 Oe and +10 Oe. It additionally has a high MR slope of at least 0.15%/Oe in an applied magnetic field between -50 Oe and +50 Oe, improved hysteresis of MR ratio, and a high MR slope in a high-frequency magnetic field. There are obtained high sensitivity MR sensors and MR heads capable of high density magnetic recording.

REFERENCES:
The Journal of Japanese Applied Magnetics Society, vol. 17, No. 2, 1993, D. Miyauchi, et al., pp. 365-368, "MR Properties and Thermal Stabilities of Cu/Co/Cu/NiFe Multilayers" (applicants explanation).
Physical Review Letters, vol. 61, No. 21, Nov. 21, 1988, M. N. Baibich, et al., "Giant Magnetoresistance of (001)Fe/(001) Cr Magnetic Superlattices", pp. 2472-2475.
Proceedings of Magnetics Research Meeting of the Japanese Electrical Society, MAG-91-161, Hoshino, et al., pp. 65-71 (Applicants discussion in specification).
Proceedings of Magnetics Research Meeting of the Japanese Electrical Society, MAG-91-242, T. Okuyama, et al., "Magnetoresistance of Maltilayers with Two Magnetic Layers", pp. 1-10 (Applicant's discussion in specification).
Journal of The Physical Society of Japan, vol. 59, No. 9, Sep. 1990, pp. 3061-3064, Teruya Shinjo, et al., "Large Magnetoresistance of Field-Induced Giant Ferrimagnetic Multilayers".
Journal of Magnetism and Magnetic Materials 99 (1991), pp. 243-252, H. Yamamoto, et al., "Magnetoresistance of Multilayers with Two Magnetic Components".
Journal of Magnetism and Magnetic Materials 121 (1993), pp. 339-343, R. Kergoat, et al., "Magnetization Reversal in Ni80Fe20/Cu/Co Spin-Valves".
Journal of Magnetism and Magnetic Materials 121 (1993), pp. 402-405, T. Valet, et al., "Correlation Between Giant Magnetoresistance and the Microstructure of Ni80Fe20/Cu/Co! Multilayers".
Appl. Phys. lett. 61 (26), Dec. 28, 1992, T. Valet, et al., "Interplay Between Oscillatory Exchange Coupling and Coercivities in Giant Magnetoresistive Ni80Fe20/Cu/Co/Cu! Multilayers", pp. 3187-3189.
Jpn. J. Appl. Phys., vol. 31, 1992, pp. L484-L486, No. 4B, Apr. 15, 1992, Hiroshi Sakakima, et al., "Low-Field Giant Magnetoresistance in Ni-Fe-Co/Cu/Co/Cu! Superlattices".

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