Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1999-01-11
2000-10-24
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, G01B 528
Patent
active
061349550
ABSTRACT:
A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample is provided and includes a force sensing probe tip disposed on a first side of a free end of a flexible cantilever which is adapted to be brought into close proximity to a sample surface; a magnetized material disposed on a second side opposite the first side of the flexible cantilever; an XY scanner for generating relative scanning movement between the force sensing probe tip and the sample surface; a Z control for adjusting the distance between the force sensing probe tip and the sample surface; and a deflection detector for generating a deflection signal indicative of deflection of the flexible cantilever. The scanning probe microscope also includes an ac signal source and a magnetic field generator for generating a magnetic field, with the magnetic field generator being coupled to the ac signal source so as to modulate the magnetic field with the ac signal. The force-sensing cantilever is magnetized with a moment along the soft axis of the cantilever.
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Han Wenhai
Jing Tianwei
Lindsay Stuart M.
Arizona Board of Regents
Larkin Daniel S.
Molecular Imaging Corporation
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