Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1995-03-10
1996-05-07
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, G01B 528
Patent
active
055135188
ABSTRACT:
In a scanning force microscope a thin film of a magnetic material is applied to one or both surfaces of a force sensing cantilever. The cantilevers are then placed between the poles of an electromagnet and a magnetizing field applied in the direction of the soft axis of the cantilevers. The field is chosen so as to be bigger than the saturation field for the magnetic film. A small electromagnet is placed in the housing of the microscope so as to generate a field normal to the soft axis of the cantilever. The field is generated by an ac voltage and causes a time varying force to be applied to the cantilever. The corresponding modulation of the cantilever position is sensed by reflection of a laser beam into a position sensitive detector. The magnitude and phase of this signal are determined by a synchronous detector. Images of the sample surface are made at constant force gradient by scanning the cantilever over the surface while adjusting the gap between the probe and sample so as to maintain a constant output from the synchronous detector.
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Larkin Daniel S.
Molecular Imaging Corporation
Williams Hezron E.
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