Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1995-06-07
1996-10-08
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250310, H01J 3714
Patent
active
055634150
ABSTRACT:
A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
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ARCH Development Corporation
Berman Jack I.
Nguyen Kiet T.
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