Magnetic lens and deflector with inner and outer pole pieces wit

Details Magnetic lens and deflector with inner and outer pole pieces wit Magnetic lens and deflector with inner and outer pole pieces wit

1998-01-14

1999-12-14

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

335210, H01J 322

Patent

active

060021357

ABSTRACT:
A composite magnetic lens and deflector for particle beam optical systems has a concentric gap and concentric conical lower pole pieces arranged to allow more accurate magnetic deflection. The flux generated by a solenoidal lens coil is shared by magnetically soft inner and higher saturation flux outer pole pieces to minimize saturation effects, while the flux generated by internal deflection coils is confined to magnetically soft inner pole pieces that minimize flux leakage and associated eddy current settling effects. Shielding rings further contain leakage flux. The inner magnetic circuit is mounted and adhesively bonded to radial flexures to minimize thermal expansion drifts.

REFERENCES:
patent: 4219732 (1980-08-01), Nakagawa et al.
patent: 4419581 (1983-12-01), Nakagawa
patent: 4469948 (1984-09-01), Veneklasen et al.
patent: 5038045 (1991-08-01), Rouberol et al.
patent: 5729022 (1998-03-01), Veneklasen et al.

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