Magnetic head with low stack height and self-aligned pole tips

Details Magnetic head with low stack height and self-aligned pole tips Magnetic head with low stack height and self-aligned pole tips

1997-05-15

2000-03-07

Scherbel, David A.

Metal working

Method of mechanical manufacture

Electrical device making

360113, G11B 5127

Patent

active

060323531

ABSTRACT:
A magnetic head includes pole tips with aligned sidewalls and a low head profile. The aligned sidewalls are formed by depositing a stack of pole tip layers on a substrate. The stack of layers are etched through a common overlying mask. The stack of layers is covered over and around with a protective layer which is then planarized such that the stack of layers is exposed. The protective layer is etched to a predetermined thickness above the substrate, which is thinner than the thickness of the stack of layers. An inductive coil layer is deposited on the etched protective layer and covered with an overlying magnetic yoke layer which is dielectrically separated from the coil layer. The yoke layer thus formed assumes a low profile curvature due to the thin structure of the protective layer on the substrate. As a consequence, the overall stack height of the magnetic head is reduced, thereby reducing the inductance of the overlying yoke layer and further alleviating the step coverage problem of the magnetic head during fabrication.

REFERENCES:
patent: 5452164 (1995-09-01), Cole et al.
patent: 5694276 (1997-12-01), Shen et al.

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