Magnetic head with air bearing surface protection film and...

Dynamic magnetic information storage or retrieval – Fluid bearing head support – Disk record

Reexamination Certificate

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Reexamination Certificate

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07551398

ABSTRACT:
To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.

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patent: 2002/0028289 (2002-03-01), Veerasamy
patent: 2007/0058297 (2007-03-01), Kasamatsu et al.
patent: 10-003630 (1998-01-01), None

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