Magnetic head with air bearing surface protection film

Dynamic magnetic information storage or retrieval – Fluid bearing head support – Disk record

Reexamination Certificate

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Reexamination Certificate

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11140557

ABSTRACT:
Embodiments of the invention provide an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in the state of an extremely thin film. In one embodiment, an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in a state of an extremely thin film is obtained by disposing a thin silicon nitride film having high density, high electric resistance, chemical stability and high adhesion with a substrate as a lowermost air bearing surface protection film and disposing a film comprising tetrahedral amorphous carbon and nitrogen as an uppermost air bearing surface protection film.

REFERENCES:
patent: 6236543 (2001-05-01), Han et al.
patent: 6793778 (2004-09-01), Gador et al.
patent: 2005/0045468 (2005-03-01), Hwang et al.
patent: 09-212840 (1997-08-01), None
patent: 10-188506 (1998-07-01), None
patent: 2001-123359 (2000-04-01), None
patent: 2001-297410 (2001-10-01), None

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