Dynamic magnetic information storage or retrieval – Fluid bearing head support – Disk record
Reexamination Certificate
2003-05-29
2004-04-06
Chen, Tianjie (Department: 2652)
Dynamic magnetic information storage or retrieval
Fluid bearing head support
Disk record
Reexamination Certificate
active
06717772
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a magnetic head slider flying above a magnetic recording medium with a small distance therebetween to record and reproduce magnetic information, and a manufacturing method therefor. Particularly, the present invention relates to a technique for improving the abrasion resistance of protrusions provided on the medium-facing surface and rails of a slider body while maintaining the manufacturing efficiency high. The present invention also relates to a technique for preventing corrosion of a magnetic head core provided on the slider body.
2. Description of the Related Art
As a conventional magnetic recording apparatus for a computer, the magnetic disk device shown in
FIG. 27
is known.
This magnetic disk device comprises a magnetic head slider
82
provided above a rotatable magnetic disk
81
opposite thereto. The magnetic head slider
82
is supported by a support arm
84
through a triangular spring plate
83
so that the magnetic head slider
82
can be moved to a desired position in the diameteral direction of the magnetic disk
81
by rotation of the support arm
84
around the rotation center
84
a.
In the magnetic disk device shown in
FIG. 27
, with the magnetic disk
81
stopped, the bottom of the magnetic head slider
82
is lightly pressed on the magnetic disk
81
by urging force of the spring plate
83
for supporting the magnetic head slider
82
, while with the magnetic disk
81
rotated, the magnetic head slider
82
flies and moves above the magnetic disk
81
at a predetermined height by means of an air flow accompanying rotation. When the rotation of the magnetic disk
81
is stopped, the flying and moving magnetic head slider
82
is again stopped by contact with the magnetic disk
81
. However, in flying and moving, magnetic information is read from or written on the magnetic recording layer of the magnetic disk
81
. The series of operations is generally referred to as “CSS (contact start stop)”.
FIGS. 28
to
30
are drawings showing the two-rail type magnetic head slider
82
conventionally used in a wide rage.
FIG. 28
is a side view showing a state in which the magnetic head slider
82
flies and moves,
FIG. 29
is a side view showing a static state, and
FIG. 30
is an enlarged sectional view of the magnetic head slider
82
taken along the length direction of side rails
86
. The magnetic head slider
82
comprises a groove (not shown) formed at the center of the bottom thereof, and the side rails
86
formed on both sides of the groove. Each of the side rails
86
has an inclined surface
86
a
formed on the lower side at the front end thereof (on the upstream side in the rotational direction of the magnetic disk
81
) so that air flows along the inclined surfaces
86
a
as shown by arrows A in
FIG. 28
to float and move the magnetic head slider
82
by means of the bottom of the side rails
86
of the magnetic head slider
82
, which serves as a positive pressure generating portion.
A magnetic head is also known, in which as shown by a two-dot chain line in
FIG. 28
, a negative pressure groove
86
b
is formed at the bottom of the side rails
86
so that the negative pressure produced by the negative pressure groove
86
b
and the positive pressure produced by the side rails
86
are balanced to stabilize flying and moving performance.
Furthermore, an adhesive film
91
of Si is formed on the surface of each of the side rails
86
, and a first carbon film
92
is formed on the adhesive layer
91
, as shown in FIG.
30
.
FIG. 28
is a side view showing a state of the magnetic head slider
82
. When the magnetic head slider
82
flies and moves, air flows to the bottom side of the magnetic head slider
82
through the inclined surfaces
86
a
, and with the negative groove
86
b
formed, negative pressure is produced on the rear side of the magnetic head. Therefore, the magnetic head slider
82
flies and moves in an inclined state at a small angle in which the air inflow side is inclined upward, as shown in FIG.
28
. The inclination angle is generally referred to as a “pitch angle” (usually about 100 &mgr;Rad).
The magnetic head slider
82
having the above-described construction is brought into sliding contact with the magnetic disk
81
when the magnetic disk
81
is started (rising) and stopped (falling). In order to prevent abrasion and wear of the surface of the magnetic disk, a protecting film is formed on the recording layer of the magnetic disk
81
, and a lubricating layer is further formed on the protecting film.
In the magnetic head slider
82
having the above construction, from the viewpoint of magnetic recording, it is advantageous that during flying, the magnetic gap G of the magnetic head slider
82
is brought as near the magnetic recording layer of the magnetic disk
81
as possible. Therefore, in flying and moving, the height of the magnetic head slider
82
is preferably as low as possible. In recent years, the amount of flying (the spacing between the magnetic head slider
82
and the magnetic disk
81
) of the magnetic head slider
82
has been further decreased with increasing recording densities and miniaturization of a magnetic disk device. In order to decrease the flying amount, the surface roughness of the magnetic disk
81
must be decreased as much as possible for avoiding contact between the magnetic head slider
82
in the flying state and the magnetic disk
81
.
However, in starting or stopping the magnetic disk
81
, the area of contact between the magnetic disk
81
and the magnetic head slider
82
increases as the surface of the magnetic disk
81
becomes smooth, to easily cause adhesion between the slider
82
and the magnetic disk
81
. This increases adhesion torque to increase the load at the start of a motor for rotating the magnetic disk
81
and easily break the support arm
84
, the magnetic head element provided on the slider or the magnetic disk recording layer at the start of rotation of the magnetic disk
81
. Therefore, in order to solve this problem, protrusions
89
are provided on the air inlet side and outlet side of each of the side rails
86
through the adhesive layer and the first carbon film to decrease the area of contact with the magnetic disk
81
. Each of the protrusions
89
comprises an intermediate film
93
made of Si, and a second carbon film
94
formed thereon. The first and second carbon film
92
and
94
generally comprise the same material from the viewpoint of manufacturing efficiency, etc.
An example of the manufacture of a conventional magnetic head slider having the above construction will be described below.
First, the adhesive layer
91
made of Si, the first carbon film
92
, the intermediate film
93
made of Si, and the second carbon film
94
are deposited by sputtering on the medium-facing surface of a plate on the magnetic disk side thereof, which is composed of Al
2
O
3
TiC and comprises a magnetic head core
90
. Then, the multilayer film comprising the adhesive layer
91
, the first carbon film
92
, the intermediate film
93
and the second carbon film
94
is patterned to form the side rails
86
and the groove therebetween on the medium-facing surface. The multilayer film remains on the surface of each of the side rails
86
, and the surface of the plate is exposed from the groove between the side rails
86
. Then, the intermediate film
93
and the second carbon film
94
on each of the side rails
86
are patterned to form the protrusion
89
. As a result the magnetic head slider
82
shown in
FIGS. 28
to
30
.
In the conventional magnetic head slider having the above construction, in starting or stopping the magnetic disk
81
, the protrusions
89
are readily worn due to friction in sliding on the magnetic disk
81
thereby causing the problem of deteriorating the effect of the protrusions
89
. Therefore, as the material for the first and second carbon films
92
and
94
, diamond-like carbon having good abrasion resistance is possibly used. However, the diamond-l
Ishihara Hirohisa
Otsuka Tomoo
Alps Electric Co. ,Ltd.
Brinks Hofer Gilson & Lione
Chen Tianjie
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