Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2008-07-08
2008-07-08
Chen, Tianjie (Department: 2627)
Dynamic magnetic information storage or retrieval
Head
Core
C360S317000
Reexamination Certificate
active
10602462
ABSTRACT:
A system and method are provided for manufacturing a coil structure for a magnetic head. Initially, an insulating layer is deposited with a photoresist layer deposited on the insulating layer. Moreover, a silicon dielectric layer is deposited on the photoresist layer as a hard mask. The silicon dielectric layer is then masked. A plurality of channels is subsequently formed in the silicon dielectric layer using reactive ion etching (i.e. CF4/CHF3). The silicon dielectric layer is then used as a hard mask to transfer the channel pattern in the photoresist layer using reactive ion etching with, for example, H2/N2/CH3F/C2H4reducing chemistry. To obtain an optimal channel profile with the desired high aspect ratio, channel formation includes a first segment defining a first angle and a second segment defining a second angle. Thereafter, a conductive seed layer is deposited in the channels and the channels are filled with a conductive material to define a coil structure. Chemical-mechanical polishing may then be used to planarize the conductive material.
REFERENCES:
patent: 5884990 (1999-03-01), Burghartz et al.
patent: 6472962 (2002-10-01), Guo et al.
patent: 6477765 (2002-11-01), Herrera
patent: 6570739 (2003-05-01), Hsiao et al.
patent: 6757133 (2004-06-01), Sato
patent: 6801407 (2004-10-01), Sasaki et al.
patent: 6859997 (2005-03-01), Tong et al.
patent: 2001/0013991 (2001-08-01), Rose et al.
patent: 2002/0066175 (2002-06-01), Huang et al.
patent: 2002/0069512 (2002-06-01), Adams et al.
patent: 2002/0171517 (2002-11-01), Guo et al.
patent: 2002/0181162 (2002-12-01), Chen et al.
patent: 2002/0191349 (2002-12-01), Hsu et al.
patent: 2002/0191350 (2002-12-01), Emilio Santini
patent: 2003/0218835 (2003-11-01), Hsiao et al.
patent: 2004/0165317 (2004-08-01), Westwood
patent: 03283104 (1991-12-01), None
patent: 11120509 (1999-04-01), None
Bedell Daniel Wayne
Hsiao Richard
Jarratt James D.
Webb Patrick Rush
Zhang Sue Siyang
Chen Tianjie
Hitachi Global Storage Technologies - Netherlands B.V.
Zilka-Kotab, PC
LandOfFree
Magnetic head coil system and damascene/reactive ion etching... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Magnetic head coil system and damascene/reactive ion etching..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnetic head coil system and damascene/reactive ion etching... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3925141