Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2008-07-08
2008-07-08
Chen, Tianjie (Department: 2627)
Dynamic magnetic information storage or retrieval
Head
Core
C360S317000
Reexamination Certificate
active
07397634
ABSTRACT:
A system and method are provided for manufacturing a coil structure for a magnetic head. Initially, an insulating layer is deposited with a photoresist layer deposited on the insulating layer. Moreover, a silicon dielectric layer is deposited on the photoresist layer as a hard mask. The silicon dielectric layer is then masked. A plurality of channels is subsequently formed in the silicon dielectric layer using reactive ion etching (i.e. CF4/CHF3). The silicon dielectric layer is then used as a hard mask to transfer the channel pattern in the photoresist layer using reactive ion etching with, for example, H2/N2/CH3F/C2H4reducing chemistry. To obtain an optimal channel profile with the desired high aspect ratio, channel formation includes a first segment defining a first angle and a second segment defining a second angle. Thereafter, a conductive seed layer is deposited in the channels and the channels are filled with a conductive material to define a coil structure. Chemical-mechanical polishing may then be used to planarize the conductive material.
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Bedell Daniel Wayne
Hsiao Richard
Jarratt James D.
Webb Patrick Rush
Zhang Sue Siyang
Chen Tianjie
Hitachi Global Storage Technologies - Netherlands B.V.
Zilka-Kotab, PC
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