Dynamic magnetic information storage or retrieval – Head – Coil
Reexamination Certificate
2007-12-04
2007-12-04
Klimowicz, William J (Department: 2627)
Dynamic magnetic information storage or retrieval
Head
Coil
Reexamination Certificate
active
10717112
ABSTRACT:
A Damascene process is provided for manufacturing a coil structure for a magnetic head. During the manufacturing process, an insulating layer is initially deposited after which a photoresist layer is deposited. A silicon dielectric layer is then deposited on the photoresist layer. After masking the silicon dielectric layer, at least one channel is etched in the photoresist layer and the silicon dielectric layer. Then, a conductive seed layer is deposited in the at least one channel. The at least one channel is then ready to be filled with a conductive material and chemically/mechanically polished to define a coil structure.
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Hsiao Richard
Kasiraj Prakash
Le Quang
Nguyen Paul Phong
Nguyen Son Van
Hitachi Global Storage Technologies - Netherlands B.V.
Klimowicz William J
Zilka-Kotab, PC
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