Magnetic force microscopy method and apparatus to detect and ima

Details Magnetic force microscopy method and apparatus to detect and ima Magnetic force microscopy method and apparatus to detect and ima

1994-03-21

1995-11-07

Wieder, Kenneth A.

Electricity: measuring and testing

Magnetic

Magnetometers

324260, 324754, 324751, G01R 3302

Patent

active

054650461

ABSTRACT:
A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.

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