Magnetic force carrier and ring for a polishing apparatus

Details Magnetic force carrier and ring for a polishing apparatus Magnetic force carrier and ring for a polishing apparatus

1999-01-25

2000-05-09

Rose, Robert A.

Abrading

Abrading process

Glass or stone abrading

451288, B24B 722

Patent

active

060596384

ABSTRACT:
The present invention provides a polishing apparatus having a drive motor, a carrier head and a polishing platen with a magnetic region formed in either the carrier head or the polishing platen. The magnetic region is configured to create an attracting force between the carrier head and the polishing platen. The drive motor is capable of producing a rotational polishing force. The carrier head is configured to retain an object to be polished, while the polishing platen has a polishing pad and is juxtaposed the carrier head.

REFERENCES:
patent: 3801293 (1974-04-01), Kiser
patent: 4222204 (1980-09-01), Benner

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