Magnetic field former for charged particle beams

Details Magnetic field former for charged particle beams Magnetic field former for charged particle beams

1987-12-11

1989-07-04

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

250396ML, 250398, 250397, H01J 3302

Patent

active

048453706

ABSTRACT:
Provided herein is an electro-magnetic field former for controlling charged particle trajectories in a scanning charge particle source including a pair of induction coils and C-shaped ferromagnetic yokes which are positioned in the air space between the particle source and a target at the target edges to normalize the angle of incidence of the particles relatve to the target and to deflect scattered particles into the target edges. Also provided is a field former controller to compensate for induced flux variations caused by an oscillating particle beam.

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