Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1998-02-26
2000-05-30
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396ML, H01J 3712
Patent
active
060693630
ABSTRACT:
Resolution of a symmetric magnetic doublet charged particle beam projection lens is improved by applying a non-uniform electrostatic field having the same symmetry conditions as the lens through the magnetic doublet which provides a maximum particle velocity at the plane of symmetry of the magnetic doublet. Since the same symmetry conditions are used for both the electrostatic and magnetic fields, the performance of the magnetic doublet is not compromised. Electrode configurations which provide more intense fields provide further reduction in aberrations for a given potential superimposed on the accelerating voltage.
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Anderson Bruce C.
International Business Machines - Corporation
Petraske, Esq. Eric W.
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