Etching a substrate: processes – Forming or treating article containing magnetically...
Patent
1993-11-10
1995-05-02
Powell, William
Etching a substrate: processes
Forming or treating article containing magnetically...
216 42, 216 58, B44C 122
Patent
active
054116309
ABSTRACT:
A method of forming projections on major surfaces of a disk comprises the steps of supporting the disk in a space, spraying a multiplicity of fine solid particles into the space, charging the sprayed fine solid particles with electricity of the same polarity so that the fine solid particles are floating in the space in a mutually separated state due to electric repellent forces acting between the fine solid particles, electrostatically depositing the fine solid particles charged with electricity on the surfaces of the disk, and etching the disk surfaces by using the deposited fine solid particles as masks, thereby forming a multiplicity of projections on the disk surfaces.
REFERENCES:
patent: 4664748 (1987-12-01), Ueno et al.
patent: 4726006 (1988-02-01), Benne et al.
patent: 5240558 (1993-08-01), Kawasak et al.
Inomata Youichi
Kato Yoshiki
Moriguchi Yoshihiro
Nagase Norikazu
Ohura Masaki
Hitachi , Ltd.
Powell William
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