Magnetic disk having a sputtered hydrogen-doped carbon protectiv

Details Magnetic disk having a sputtered hydrogen-doped carbon protectiv Magnetic disk having a sputtered hydrogen-doped carbon protectiv

1993-05-03

1995-03-14

Resan, Stevan A.

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

428694TC, 428900, G11B 500, B32B 900

Patent

active

053976444

ABSTRACT:
A carbon film for protecting a magnetic disk is sputtered in the presence of hydrogen. If a sufficient amount of hydrogen is present in the sputtering chamber, the resulting carbon film will exhibit superior mechanical characteristics, i.e. an enhanced wear resistance during a contact-start-stop or drag test in a disk drive. Sputtering in the presence of hydrogen can be accomplished by either DC or RF magnetron sputtering, or DC or RF diode sputtering.

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