Magnetic-cusp, cathodic-arc source

Details Magnetic-cusp, cathodic-arc source Magnetic-cusp, cathodic-arc source

1994-04-25

1995-11-21

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

20419238, 313157, 31511141, 250426, C23C 1432

Patent

active

054683637

ABSTRACT:
A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission.

REFERENCES:
patent: 4929321 (1990-05-01), Buhl
patent: 5279723 (1994-01-01), Falabella et al.
patent: 5282944 (1994-02-01), Sanders et al.
patent: 5306407 (1994-04-01), Hauzer et al.
Sanders et al., "Coatings . . . Experiments", Thrust Area Report, FY 1990, pp. 4-14 to 4-18.
Falabella et al., "Comparison . . . sources", J. Vac. Sci. Technol. A 10(2), Mar./Apr. 1992, pp. 394-397.

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