Conveyors: power-driven – Conveyor section – Load propelled as the reactive means in a linear motor or...
Patent
1987-07-14
1989-02-21
Spar, Robert J.
Conveyors: power-driven
Conveyor section
Load propelled as the reactive means in a linear motor or...
198811, 1986901, 104283, 104286, 104156, B05G 3500
Patent
active
048057614
ABSTRACT:
A conveyor system for transporting wafers to and from different work stations in a clean-controlled environment includes a platform being magnetically levitated above a U-shaped rail by a magnetic cushion provided by first magnets on the platform and the rail, the first magnets having their magnetic poles arranged to repel one another. A nonmagnetic tube within which is a free-sliding magnetic piston of the same polarity as the first magnets extends along the center of the track. A second magnet is disposed on the platform such that its polarity will repel (or attract) the piston magnet such that as the pressure differential in the tube is changed the piston magnet slidably moves within the tube and pushes (or draws) the platform along the track with it.
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Engineering Materials & Design (GB), vol. 22, No. 2.
Dayoan D. Glenn
Spar Robert J.
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