Magnetic-bias ferromagnetic spiral inductor

Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil

Reexamination Certificate

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C336S223000, C336S232000

Reexamination Certificate

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07417524

ABSTRACT:
A semiconductor device having a semiconductor substrate and a first insulator overlying the semiconductor substrate. A spiral coil inductor overlies the first insulator and a second insulator overlies the spiral coil inductor. A patterned ferromagnetic film overlies the second insulator and a patterned magnetic-bias film overlies the patterned ferromagnetic film.

REFERENCES:
patent: 5583474 (1996-12-01), Mizoguchi et al.
patent: 7224254 (2007-05-01), Choi et al.
patent: 2003/0193743 (2003-10-01), Sasaki et al.

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