Electricity: electrical systems and devices – Control circuits for electromagnetic devices – Systems for magnetizing – demagnetizing – or controlling the...
Reexamination Certificate
2007-11-06
2007-11-06
Sherry, Michael (Department: 2836)
Electricity: electrical systems and devices
Control circuits for electromagnetic devices
Systems for magnetizing, demagnetizing, or controlling the...
C310S090500
Reexamination Certificate
active
11088063
ABSTRACT:
To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section281stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section281outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section252performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section281, and outputs, to an A/D converter154, a sensor output signal153having a sensor output voltage V after the sensor sensitivity adjustment.
REFERENCES:
patent: 6653830 (2003-11-01), Luetzow
patent: 1233189 (2002-08-01), None
patent: 1318310 (2003-06-01), None
patent: 1396649 (2004-03-01), None
Fukami Hideo
Kawashima Toshiaki
Namiki Hirotaka
Adams & Wilks
BOC Edwards Japan Limited
Nguyen Danny
Sherry Michael
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