Magnetic bearing device and turbo molecular pump with the...

Electrical generator or motor structure – Dynamoelectric – Rotary

Reexamination Certificate

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Reexamination Certificate

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07091641

ABSTRACT:
To provide a magnetic bearing device capable of lowering the costs required for the manufacture, installation, or the like of a turbo molecular pump by reducing the number of elements of an amplifier circuit that drives, through excitation, electromagnets as well as the number of wires of a cable that connects the each electromagnet and the amplifier circuit to each other, and a turbo molecular pump with the magnetic bearing device mounted thereto. One end of an electromagnet coil is connected to a common node. Also, the other end thereof is connected to an amplifier circuit composed of one transistor and one diode. Further, the one end of the electromagnet coil is common with respect to each of the electromagnets, and the common node R is controlled by an intermediate-voltage maintaining circuit so as to maintain an intermediate voltage.

REFERENCES:
patent: 3823990 (1974-07-01), Gillinson, Jr.
patent: 5973468 (1999-10-01), Yamauchi
patent: 6005316 (1999-12-01), Harris
patent: 6259179 (2001-07-01), Fukuyama et al.
patent: 6278251 (2001-08-01), Schöb
patent: 6297574 (2001-10-01), Schöb et al.
patent: 6873075 (2005-03-01), Taira et al.
patent: 6949853 (2005-09-01), Kawashima
patent: 0395116 (1990-04-01), None

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