Magnetic beam deflection system free of chromatic and geometric

Details Magnetic beam deflection system free of chromatic and geometric Magnetic beam deflection system free of chromatic and geometric

1978-03-29

1980-03-04

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, H01J 3700

Patent

active

041918878

ABSTRACT:
In a magnetic deflection system for deflecting a beam of charged particles, through a given beam bending angle at least four beam deflecting stations are serially arranged along the beam path for bending the beam through the beam bending angle .PSI.. Each of the beam bending stations includes a magnet for producing a static magnetic field component of a strength and of a shape so that the beam is deflected free of transverse geometric aberrations of second order. The beam deflection system also includes sextupole magnetic field components of such a strength and location so as to eliminate second order chromatic aberrations of the deflected beam without introducing second order geometric aberrations, whereby a magnetic beam deflection system is provided which is free of both transverse chromatic and geometric aberrations of second order.

REFERENCES:
patent: 3344357 (1967-09-01), Blewett
patent: 3405363 (1968-10-01), Brown
patent: 3867635 (1975-02-01), Brown et al.

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